Tungsten hexafluoride (WF₆) is a chemical compound with the CAS number 7783-82-6. It is widely used in the semiconductor industry and other high-tech applications due to its unique properties. Here are some key characteristics of tungsten hexafluoride:
Physical Properties:
Appearance: Tungsten hexafluoride is a colorless gas at room temperature and pressure.
Boiling Point: Approximately 12.8°C (55°F).
Melting Point: -59.2°C (-74.6°F).
Density: 6.23 g/cm³ at 25°C.
Solubility: It is non-reactive with many common solvents but may react with water or moisture.
Chemical Properties:
Stability: Stable under normal conditions but decomposes when exposed to heat or moisture.
Reactivity: It is highly reactive with water and most organic materials, releasing toxic and corrosive hydrogen fluoride (HF).
Health Hazards:
Toxicity: Tungsten hexafluoride is highly toxic by inhalation and can cause severe respiratory problems, including lung damage.
Corrosivity: It is corrosive to the skin and eyes, and exposure can lead to burns.
Uses:
Semiconductor Industry: It is used in chemical vapor deposition (CVD) processes for the deposition of tungsten films in microelectronics.
Metallurgy: Used in the production of tungsten-based alloys and compounds.
Research: Utilized in various research fields due to its unique properties.
When handling tungsten hexafluoride, always use appropriate personal protective equipment (PPE), work in a well-ventilated area or fume hood, and follow strict safety protocols to prevent inhalation and skin contact. Ensure that you have access to emergency procedures and first aid facilities.